INFICON Cygnus Thin Film Deposition Controller - Manual (Page 118)

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Cygnus Operating Manual
34
(0x22)
Sensor Type 1 = Single
2 = CrystalTwo
6 = CrystalSix
7 = Rotary
12 = Crystal12
Int 1 12
35
(0x23)
Sensor Switch
Output
0, 1-38 Int 0 38
36
(0x24)
Secondary
Tooling
% float 1.0 999.9
37
(0x25)
Number of
Crucibles
1,4,8,16,32,64 Int 1 64
38
(0x26)
Crucible 1-64 Int 1 64
39
(0x27)
Crucible
Output
0, 1-37
See Note 1
See Note 3
Int 0 37
40
(0x28)
Crucible
Output Type
0 = NO, 1 = NC Int 0 1
41
(0x29)
Turret
Feedback
1 = Yes, 0 = No Int 0 1
42
(0x2a)
Turret Input 0, 1-28
See Note 2
Int 0 28
43
(0x2b)
Turret Delay sec Int 1 60
44
(0x2c)
RateWatch
Time
sec
See Note 4
Int 60 5999
(99:59)
45
(0x2d)
RateWatch
Accuracy
% Int 0 99
46
(0x2e)
Averaging
Time
minutes Int 0 30
Table 5-4 Channel Parameters (continued)
Channel
Command
ID Name
Units / Allowed
Values / Notes
Data
Type Low Limit High Limit