1 procedure overview, 2 procedure assumptions and requirements – INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
7.5.1 Procedure Overview
The procedure consists of steps to deposit on both crystals having only one source
turned on and then to calculate the interference at sensor Channel “N+1” as a
percentage of the rate at sensor Channel "N". The first source is then turned off and
a deposit is made on both crystals having only the second source turned on. The
interference at sensor Channel "N" is then calculated as a percentage of the rate
at sensor Channel "N+1".
Having calculated and entered the cross talk percent values, a co-deposition can
then be run with the cross talk corrected for each crystal. A detailed procedure on
how to accomplish this is outlined below. The amount of cross talk at each sensor
must be less than 100%.
NOTE: Due to the way the cross sensitivity parameter is implemented in the
Cygnus, the selection of Co-Deposition channels are based on the
Channel number N=Odd value and N+1=Even value adjacent source
channels. Also, the density and Z-Ratio values for both channels are
required to be the same when calculating the Cross Talk Percent values.
After calculating the proper Cross Talk Percent values, the density and
Z-Ratio parameters are returned to their proper values.
7.5.2 Procedure Assumptions and Requirements
It is assumed the operator is familiar with the operation and programming of the
instrument.
Use Channel N and (N+1) as the adjacent channels to have Cross Talk Percent
calculated for each channel.
The Tooling Factors for each sensor must be determined prior to calculating the
Cross Sensitivity values. If this has not been done, refer to
.
Set the Max Power Option parameter for each channel to 0 (Continue).
Program the Final Thickness value for each channel to be 999.9 kÅ.
Program the pre-deposition and post-deposition states for the Sources and the
desired deposition Rates you wish to co-deposit.
Program all source and sensor shutters to their appropriate values.
Use the detailed procedure below to calculate the Cross Talk Percent values to
be entered into the respective Channel Definitions.