INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
DEP AFTER PREDEP . . . . . . . . . . . 0, 1, 2 (default = 1)
This parameter is used to determine which rate control state to enter after Soak
Time 2. It will also determine whether Auto Soak 2 is enabled.
0 = NonDeposit Control after Soak 2. No Auto Soak 2.
1 = Enter Deposit Control after Soak 2. No Auto Soak 2.
2 = Enter Deposit Control after Soak 2. Enable Auto Soak 2.
RATE . . . . . . . . . . . . . . . . . . . . . . . . 0.000 to 999.9 Å/sec (default = 0.000)
NOTE: Rate = 0.000 will take a channel in control to post deposit.
This specifies the rate at which the deposition is to be controlled during the
DEPOSIT and NON-DEPOSIT CONTROL states. The Rate is calculated
based on:
The rate information acquired by the sensor in use, based on the density
and tooling values entered for this Channel.
The tooling factor that corrects for any relative difference in flux distribution
reaching the sensor.
FINAL THICKNESS . . . . . . . . . . . . . 0.000 to 999.9 kÅ (default = 0.000)
This is the thickness setting that triggers the end of the DEPOSIT state. The
Substrate Shutter output returns to its normal state. The deposition profile then
proceeds to the State indicated by the ON FINAL THICK parameter value, or
by a user supplied input via the I/O or one of the Remote Communications
ports.
ON FINAL THICKNESS. . . . . . . . . . 0, 1, 2 (default = 1)
The On Final Thickness parameter value determines the next step of the
deposition profile.
0 = NonDeposit Control. Entering a value of 0 directs the deposition profile to
enter the NonDeposit Control state, returning the substrate shutter output to its
normal state, when the final thickness value is reached during the Deposit
state.
1 = Idle Ramp. Entering a value of 1 directs the deposition profile to enter the
Idle Ramp state when the final thickness value is reached during the Deposit
state.
2 = Continue. Entering a value of 2 directs the deposition profile to continue in
the Deposit state. Thickness continues to be accumulated.