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INFICON Cygnus Thin Film Deposition Controller User Manual

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Cygnus Operating Manual

SENSOR MAINTENANCE Display Function Keys

F1 CRYSTAL SWITCH

To initiate a crystal switch, press function key F1.

F2 ROTATE XTAL HEAD

If the channel sensor type is a CrystalSix, Crystal12, or Rotary, press function
key F2 to sequentially rotate the sensor head through all positions. This is
useful to initialize a CrystalSix, Crystal12 or Rotary sensor after replacing failed
crystals, or changing Sensor Type parameter.

F3 CLEAR FAILED CRYSTALS

If the channel sensor type is a CrystalTwo, CrystalSix or Crystal12, press
function key F3 to clear all non current failed crystal position numbers
(CrystalSix, Crystal12) or to increment the number of good crystals
(CrystalTwo), if applicable.

F4 CLEAR QUALITY / STABILITY

To clear the Quality and Stability counters, press function key F4.

F5 SOURCE MAINTENANCE

To access the channel source maintenance display press function key F5.

F6 CHANNEL

To return to the Operate display, press function key F6.