INFICON Cygnus Thin Film Deposition Controller - Manual (Page 132)

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Cygnus Operating Manual
17
(0x11)
State before Stop Byte. See state encodings listed with SC5. If not
currently in Stop, will return "No Data" error.
See Note 1.
18
(0x12)
Cause of Stop Byte. If not currently in Stop, will return "No Data"
error.
Code Cause
0 Front Panel
1 Max Power
2 Crystal Fail
3 Power Loss
4 Crucible Switch Error
5 Crystal Switcher Fail
6 Remote Command
7 Internal Logic
8 Hand Held Controller
See Note 1.
19
(0x13)
Channel Errors 2 bytes
0x8000 Xtal Fail
0x4000 Xtal Switch Error
0x2000 Cruc Switch Error
0x1000 No Time Power Ave.
20
(0x14)
Channel Status 2 bytes
0x8000 Max Power
0x4000 Min Power (during control only)
0x2000 Xtal Switching
0x1000 Cruc Switching
0x0800 Abbreviated Average
0x0400 Unable to Auto-Z
0x0200 RateWatcher Sample
0x0100 RateWatcher Hold
0x0080 RateWatcher Delay
21 Deposit Average Power Float, based on Averaging Time Parameter. Only
available when in a control state.
See Note 1.
22 Raw Rate Float, Å/s
Table 5-8 Status Channel Commands (continued)
SC
Command
ID (HEX) Meaning Response