INFICON Cygnus Thin Film Deposition Controller - Manual (Page 137)

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Cygnus Operating Manual
5.4.5.1 Remote Channel Action Commands
These commands are used to affect actions associated with Channels. Single or
multiple values may be required for some commands. If the Channel designated is
not currently active, an "F" (cannot change value now) error code will be returned.
The message format is:
RC<(Action Value)>
Command ID = . See Remote Channel Command table below
Channel Number = 1 to 6
Action Value = ||. A few commands have a value with
them. See the
Table 5-10 below.
Command Response:
ACK|
Table 5-10 Remote Channel Commands
RC
Command
ID Meaning Action Value
1
(0x01)
Stop
2
(0x02)
Reset
3
(0x03)
Start
4
(0x04)
Zero Thickness
5
(0x05)
Start New Deposit -Will always zero thickness on
entry. This cannot be done from Ready, Stop, or
Crucible Switch, or while crystal switching (use
Start, RC3, from Ready or Stop). When there is
no good crystal, this command will go to "Time
Power" if the previous state was Non-Deposit
Hold, otherwise, it is not allowed.
6
(0x06)
Go to Non-Deposit Control. This cannot be done
from Ready, Stop, Crucible Switch, or while
crystal switching (use Start, RC3, from Ready or
Stop). When there is no good crystal, this
command will go to "Non-Deposit Hold" if the
previous state was Time Power, otherwise, it is
not allowed.