INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
ILLEGAL INPUT
An attempt was made to enter an invalid parameter or a function key was
pressed and the function can not be completed at the time the key was
pressed.
ILLEGAL LOCK CODE
The correct lock code is necessary to unlock parameters.
ILLEGAL SENSOR TYPE
Sensor type may be only 1, 2, 6, 7, or 12.
ILLEGAL TIME
Time is invalid. Numbers designating hours must be in the 00 to 23 range;
numbers designating minutes must be in the 00 to 59 range.
IN CRUCIBLE SWITCH
The requested function can not be performed while the Channel is in the
Crucible Switch state.
INVALID EQUATION
Strings must have connectors and required numerics before exiting the Logic
Statement.
I/O EQUATIONS LOCKED
The strings comprising the I/O equations cannot be accessed while the
program lock code is set.
LOADED DIFFERENT VER
Successful loading of an older Cygnus configuration file. New parameters may
have been added at their default values and/or parameter ranges may have
been increased.
LOCK
Indicates the remote communications or program lock code is on.
LOCK CODE ACCEPTED
The correct lock code has been entered.
LOCK CODE CLEARED
The lock code has been deleted.
LOCKED -NOT CHANGED
An attempt is being made to change a logic statement while the remote lock
code is on.
MAX POWER
Indicates the specified maximum power has been reached on an active
Channel. The power value will be displayed in inverse video.
MAXIMUM TERMS
No more than 5 terms are allowed in any one Event or Action string.