INFICON Cygnus Thin Film Deposition Controller - Manual (Page 89)

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Cygnus Operating Manual
DAC 4 . . . . . . . . . Channel 4 Power
DAC 5 . . . . . . . . . Channel 1 Thickness
DAC 6 . . . . . . . . . Channel 2 Thickness
DAC 7 . . . . . . . . . Channel 3 Rate
DAC 8 . . . . . . . . . Channel 4 Rate
DAC 9 . . . . . . . . . Channel 1 Rate
DAC 10 . . . . . . . . Channel 2 Rate
DAC 11 . . . . . . . . Channel 3 Thickness
DAC 12 . . . . . . . . Channel 4 Thickness
When Option 3 is selected, the DAC outputs are:
DAC 1 . . . . . . . . . Channel 1 Rate
DAC 2 . . . . . . . . . Channel 2 Rate
DAC 3 . . . . . . . . . Channel 3 Rate
DAC 4 . . . . . . . . . Channel 4 Rate
DAC 5 . . . . . . . . . Channel 5 Rate
DAC 6 . . . . . . . . . Channel 6 Rate
DAC 7 . . . . . . . . . Channel 1 Thickness
DAC 8 . . . . . . . . . Channel 2 Thickness
DAC 9 . . . . . . . . . Channel 3 Thickness
DAC 10 . . . . . . . . Channel 4 Thickness
DAC 11 . . . . . . . . Channel 5 Thickness
DAC 12 . . . . . . . . Channel 6 Thickness
THICKNESS EQUATION 1,2,3 . . . . 0 to 654321 (default = 0)
Each of the three thickness equations can be set up to sum the thickness of the
specified Channels. Each Channel can only be used once in an equation but
can be used in all three. For example, 12 means sum the thickness of Channels
1 and 2, 1234 sums the first four Channels. Thickness equations are designed
to be used in logic statements.
4.4 Logic Directory Set Up
Cygnus has programmable logic capabilities that allow it to specifically respond to
certain process states as well as External Inputs and to send control signals
(Outputs) to external devices based on Inputs or specific instrument conditions.
The logic capabilities can also be used to control the execution of a Channel
without operator intervention. These capabilities can be specifically tailored by
programming the Logic Statements.
4.4.1 Logic Statement Overview
The Logic Directory is accessed by pressing the LOGIC DIRECTORY key (F1) on
the General Parameters display, refer to
Figure 4-1 on page 4-1 . From the Logic
Directory display, press the SELECT LOGIC STATEMENT (F5) function key to edit
a logic statement.