INFICON Cygnus Thin Film Deposition Controller User Manual

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Cygnus Operating Manual

(0x0E)

Data Log

Multple pieces of information, as follows:
Year (Integer)
Month (Integer
Day (Integer)
Hour (Integer)
Minute (Integer)
Run TIme (Integer)(seconds)
Deposit Time (Integer)(seconds)
Ending Thickness (Float)(kÅ)
Average Rate (Float)(Å/s)
Average Rate Deviation (Float)(Å/s)
Ending Power (Float)(%)
Average Power (Float)(%)
Where is goes next (Byte)(0=Non Deposit Control or

Non Deposit Manual, 1 = Post Deposit, 2 = Stop)

Termination Reason (Byte)(0-8 match the "cause of

Stop" coding in command 18 below; 9 = Normal
termination; 10 = Manual substrate shutter
closing)

Time Power Flag (Byte) (0=No, 1 = Yes)
Power Fail Flag (Byte)(0=No, 1=Yes)
Power Fail Thickness (float)(kÅ, 0 if not a power fail,

otherwise the thickness when the power was
lost.)

See Note 1.

(0x0F)

Data log with Crystal
History.

All of the data from command 14 plus the following
for each of 12 (potential) crystals on the sensor:
Crystal Number (Byte)
Begin Frequency (Float)(Hz)
End Frequency (Float)(Hz)
Begin Life (Integer)
End Life (Integer)
Begin Activity (Integer)
End Activity (Integer)
Stability (Float) (Hz)
Quality Count (Integer)
(repeat for remaining crystals)
See Note 1.

(0x10)

Deposit Average Rate Float, based on Averaging Time parameter. Only

available when in a control state.
See Note 1.

Table 5-8 Status Channel Commands (continued)

Command

ID (HEX)

Meaning

Response