INFICON Cygnus Thin Film Deposition Controller User Manual

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Cygnus Operating Manual

SENSOR SHUTTER OUTPUT . . . . 0 to 38 (default = 0)

This parameter designates which of the 38 outputs is to be used to activate the
Crystal Shutter for this Channel. Values range from 0 to 38. Values 1 through
38 correspond to the appropriate output. Value 0 indicates that a shutter is not
used. If a value other than 0 is entered, the output chosen as the Crystal
Shutter output is designated as such on the I/O Map Display. The sensor
shutter output is activated when this Channel enters either the Deposit,
Manual, Non-Deposit Control states and during the Sample portion of the
RateWatcher function.

SENSOR SHUTTER OUTPUT TYPE . . . . . . . . 0, 1 (default = 0)

This parameter designates the normal state of the contact closure for the
Sensor Shutter output. Permissible values are 0 and 1. 0 indicates a Normally
Open output, 1 indicates a Normally Closed output.

SENSOR TYPE . . . . . . . . . . . . . . . . 1, 2, 6, 7, 12 (default = 1)

This parameter provides selection among the Single sensor (1), CrystalTwo
sensor (2), CrystalSix sensor (6), and Rotary sensor (7), Crystal12 (12). It
enables the Crystal Switch feature for the CrystalTwo, CrystalSix, Crystal12
and Rotary sensor heads and enables the crystal indexing feature on the hand
held power controller. If a value of 1 is entered, the Sensor Switch Output
parameter is removed from the display.

SENSOR SWITCH OUTPUT . . . . . . 0 to 38, (default = 0)

This parameter designates which of the 38 outputs is to be used as the Sensor
Switch output for the Channel. Values range from 0 to 38. Values 1 through 38
correspond to the appropriate output. Value 0 indicates that the Sensor Switch
Output is not used. A nonzero value must be entered if a Sensor Type value of
2, 6, 7, or 12 is chosen. This non-zero value’s output is displayed on the I/O
Map screen. The contact closure on this relay is always Normally Open.

If CrystalTwo is chosen, the output will close upon initiating a Crystal Switch
and then open upon initiating a second Crystal Switch. If CrystalSix is chosen,
then upon initiating a Crystal Switch, the output will first close for one second,
then open for one second, then close for one second and then open (i.e., two
pulses to move one position). If a Rotary or Crystal12 sensor is chosen, upon
initiating a Crystal Switch the output will first close for one second and then
open (that is, one pulse to move one position).

NUMBER OF CRUCIBLES . . . . . . . 1, 4, 8, 16, 32, 64 (default = 1)

This parameter can be used to automatically index the turret position when
using a multiple pocket turret source. The value selected denotes the number
of pockets in the turret source. The value 1 indicates a single pocket source,
and the parameters — Crucible Output, Crucible Output Type, Turret Feedback
and Turret Delay or Turret Input — are removed from the Display. The number
of crucibles determines the number of outputs needed for crucible indexing. As