INFICON Cygnus Thin Film Deposition Controller User Manual
Page 78
3 - 10
IP
N 07
4-
37
9-
P1
K
Cygnus Operating Manual
RATEWATCHER OPTION . . . . . . . . 0, 1, 2 (default = 0)
This parameter controls the use of the RateWatcher.
0 = None, disabled
1 = Non-deposit state only
2 = Non-deposit and deposit states
RATEWATCH HOLD TIME . . . . . . . 00:01 to 99:59 min:sec (default = 00:05)
RateWatch Time determines the time interval over which the sensor shutter will
be closed between samples.
RATEWATCH ACCURACY . . . . . . . 1 to 99 % (default = 5)
During the rate sampling period, the deposition rate is measured by the crystal;
source power control is active. When the rate is within the desired accuracy for
a period of time, the shutter is closed and the deposition state returns to HOLD.
RATE FILTER TIME. . . . . . . . . . . . . 0.1, 0.4, 1.0, 4.0, 10.0, 20.0, 30.0 sec.
(default = 0.1)
This parameter is used to apply a boxcar filter to the measured “raw” rate which
is used to produce the Rate DAC output voltage.
The Rate Filter Time may be used for enhanced resolution. If a source has a
long time constant, rate may be taken as constant over longer intervals
Averaging provides an opportunity to reduce rate noise. Depending on the
source of the noise, averaging can improve rate resolution:
Parameters
Averaging
Time
Rate
Filter
Time
RateWatcher
"Sample"
Acceptance
Window
Time
Rate and Power are simultaneously averaged
using the following stored data
0 min
< 10 sec
5 seconds
2 second interval before
most recent 0.5 seconds
0 min
10 sec
10 seconds
2 second interval before
most recent 0.5 seconds
1 min
any
60 seconds
2 second interval before
most recent 0.5 seconds
> 1 min
any
Averaging
Time * 60
seconds
Averaging Time excluding the most recently
calculated 1 minute average