INFICON Cygnus Thin Film Deposition Controller - Manual (Page 117)

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Cygnus Operating Manual
24
(0x18)
Max Power
Option
0 = Continue
1 = Idle Ramp
2 = Stop
Int 0 2
25
(0x19)
Scale 0 = Power
1 = +/- 10 Å/s
2 = +/- 20 Å/s
Int 0 2
26
(0x1a)
Scan Rate 0 = Auto
1 = Slow
2 = Med.
3 = Fast
Int 0 3
27
(0x1b)
Source Voltage
Range
0 = +10V
1 = +5V
2 = +2.5V
3 = -10V
4 = -5V
5 = -2.5V
Int 0 5
28
(0x1c)
DAC Rate
Range
0 = 0 to 10 Å/s
1 = 0 to 50 Å/s
2 = 0 to 100 Å/s
3 = 0 to 1000 Å/s
4 = 0 to 1 Å/s
Int 0 4
29
(0x1d)
DAC Thick
Range
0 = 0 to 100 Å
1 = 0 to 1000 Å
2 = 0 to 2000 Å
3 = 0 to 3000 Å
4 = 0 to 5000 Å
Int 0 4
30
(0x1e)
Substrate
Shutter Output
0, 1-38
See Note 1
Int 0 38
31
(0x1f)
Substrate
Shutter Output
Type
0 = NO, 1 = NC Int 0 1
32
(0x20)
Sensor Shutter
Output
0, 1-38
See Note 1
Int 0 38
33
(0x21)
Sensor Shutter
Output Type
0 = NO, 1 = NC Int 0 1
Table 5-4 Channel Parameters (continued)
Channel
Command
ID Name
Units / Allowed
Values / Notes
Data
Type Low Limit High Limit