INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
Rate & Thickness Control with
Shutter open . . . . . . . . . . . . . . . . . 0.001 to 999.9 Å/sec
Rate Control with Shutter closed . . . 0.001 to 999.9 Å/sec
Idle Ramp . . . . . . . . . . . . . . . . . . . . . 1 per Source
Idle Power. . . . . . . . . . . . . . . . . . 0.00 to 99.99%
Idle Ramp Time . . . . . . . . . . . . . 00:00 to 99:59 min:sec
Deposit After Pre-Deposit. . . . . . . . . Yes / No
Yes = go to Deposit
No = go to Non-Deposit Rate Control
Density . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 99.999 gm/cc
Z-ratio . . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 15.000
Control Loop types . . . . . . . . . . . . . . 0 / 1 / 2
Non-PID, PI, PID
PID Control Mode. . . . . . . . . . . . . . . Fast or Slow Source
Process Gain . . . . . . . . . . . . . . . 0.01 to 999.99 Å/sec/%Power
Primary Time Constant . . . . . . . . 0.010 to 9999.99 seconds
System Dead Time . . . . . . . . . . . 0.010 to 9999.99 seconds
Tooling Factor. . . . . . . . . . . . . . . . . . 1.0 to 999.9%
Secondary Tooling . . . . . . . . . . . . . . 1.0 to 999.9%
Sensors . . . . . . . . . . . . . . . . . . . . . . 2 standard, 4 additional w/optional hardware
Sensor Type . . . . . . . . . . . . . . . . . . . 1 / 2 / 6 / 7 / 12
(Single, CrystalTwo, CrystalSix, Rotary,
Crystal12)
CrystalSix Position Select. . . . . . Indexes to next good crystal
Sensor Switch Output. . . . . . . . . . . . 0 to 38
Sensor Shutter Output . . . . . . . . . . . 0 to 38
Sensor Shutter Output Type. . . . . . . 0 / 1
Normally Open, Normally Closed
Maximum Source Power . . . . . . . . . 0.01 to 99.99%
Minimum Source Power . . . . . . . . . . 0.00 to 99.98%
Maximum Power Option . . . . . . . . . . Stop / Idle Ramp / Continue — can be
selected for each source individually.
Averaging Time . . . . . . . . . . . . . . . . 0 to 30 minutes
Final Thickness . . . . . . . . . . . . . . . . 0.000 to 999.9 kЕ