3 bakeable sensor – INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
8.3.3 Bakeable Sensor
For the Bakeable sensor, the procedure is the same as the regular crystal except
that you must first unlock the cam assembly by flipping it up. Once the crystal has
been replaced, place a flat edge of the holder flush with the cam mechanism and
lock it in place with the cam. See
Figure 8-2 Bakeable Crystal Sensor
CONTACT
IPN 007-099
INSULATOR
IPN 007-103
SPREADER BAR
IPN 007-267-P2
SHOULDER WASHER
IPN 007-268-P1
TWO REQUIRED
SHOULDER WASHER
IPN 007-269-P1
CAM MECHANISM
IPN 007-095
COVER
IPN 007-101
CLAMPING SPRING IPN 007-094
CRYSTAL RETAINER IPN 007-064
FULLY COATED FACE (GOLD)
CRYSTAL IPN 008-010-G10
CRYSTAL HOLDER &
RETAINER SPRING
IPN 750-218-G1
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