INFICON Cygnus Thin Film Deposition Controller - Manual (Page 133)

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23 Enhanced Sensor
Status Byte, same as 11 with bits 7 and 6 set per Z-Ratio
type.
Bit 1 Bit 0
0 0 Good Crystal
0 1 Failed Crystal
1 0 Invalid Measurement on Crystal
1 1 Undefined
Bit 7 Bit 6
0 0 Auto Z-Ratio
0 1 Sensor Z-Ratio
1 0 Material Z-Ratio
1 1 Undefined
24 Current Z-Ratio Float, Z-Ratio currently in use
25 Anharmonic Reading Integer, unconverted. See Note 2.
26 Anharmonic Activity Integer, Range 0 - 650
27 One Minute Rate
Average & One Minute
Power Average Float, Float: Returns a "No Data Error" if not enough
data to do a one minute average of the rate or the
power. See Note 1.
28 Crystal Inventory Returns "No Data Error" for single sensor and rotary
sensors. For multi-crystal sensors, returns the
crystal inventory as follows:
Number of crystals - 1 byte
Current Position - 1 byte
For each crystal returns the following:
Crystal Status - 1 byte
Fundamental Frequency - 4 byte integer. See Note 2.
Activity - 4 byte integer
29 New crystal frequency Returns the Fundamental and Anharmonic "NEW"
crystal frequencies, returned as two
4 byte integers. See Note 2.
30 LCQ value Returns the LCQ running value, returned as one 4
byte float.
Note 1: If all channels are selected for this command and any one of the six channels does
not have data, then the "No Data Error" is returned alone.
Note 2: Frequencies are returned as an integer. To convert to Hz, multiply by
0.004656612823
Table 5-8 Status Channel Commands (continued)
SC
Command
ID (HEX) Meaning Response