INFICON Cygnus Thin Film Deposition Controller - Manual (Page 129)

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Cygnus Operating Manual
5.4.4.1 Status Channel Command
The message format is:
SC
Command ID = See Table 5-8 .
Channel Number = 0 to 6, 0 means all channels.
Command Response:
If Channel Number = 1 to 6:
ACK<|||>|
See the "Response" column in
Table 5-8 .
If Channel Number = 0:
ACK<|
||ial>>|Code>
Description: If Channel Number = 0, the response for each of the six channels
are given, channel 1 is given first.
Table 5-8 Status Channel Commands
SC
Command
ID (HEX) Meaning Response
0
(0x00)
Data Byte Sensor Status, Byte State, Float Rate Filtered,
Float Thickness, Float Power, Float Rate Deviation
1
(0x01)
Filtered Rate Float, A/s
2
(0x02)
Displayed Rate Float, A/s, averaged over one second.
3
(0x03)
Source Power Output Float, %
4
(0x04)
Thickness Float, kЕ