INFICON Cygnus Thin Film Deposition Controller - Manual (Page 178)

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Cygnus Operating Manual
9 crystal fail message is
always on a. XIU/oscillator not
connected a. verify proper
sensor/oscillator
connections
b. XIU oscillator
malfunctioning b. if available, insert a
known working
XIU/oscillator in place of
suspect one; if
XIU/oscillator is confirmed
bad, contact INFICON
service department
c. defective cable from
feedthrough to
XIU/oscillator or from
instrument to XIU/oscillator c. use an ohm meter or
DVM to check electrical
continuity or isolation as
appropriate
d. poor electrical contact in
the transducer,
feedthroughs, or in-vacuum
cable d. use an ohm meter or
DVM to check electrical
continuity or isolation as
appropriate
e. failed crystal/no crystal e. replace crystal/insert
crystal
f. two crystals placed into
the crystal holder f. remove one of the
crystals
g. frequency of crystal out of
range g. verify that the crystal
frequency is within the
required range, use
INFICON crystals.
Table 8-1 Troubleshooting the Instrument (continued)
SYMPTOM CAUSE REMEDY