INFICON Cygnus Thin Film Deposition Controller - Manual (Page 53)

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Cygnus Operating Manual
2.3.1.3.1.1 HARDWARE PROCESS Display
The Channel HARDWARE display contains channel specific hardware related
parameters. This display is accessed by selecting the HARDWARE PARMS
function key (F1) from the PROCESS display. See
section 3.3 on page 3-12 for a
detailed description for programming of these parameters.
Figure 2-10 HARDWARE Display
HARDWARE Display Function Keys
F1 PROCESS PARMS
To access the PROCESS (see Figure 2-9 ) related channel information, press
function key F1.
F6 CHANNEL
To return to the CHANNEL display, press function key F6.
2.3.1.3.2 Channel SENSOR MAINTENANCE Display
Figure 2-11 SENSOR MAINTENANCE Display