INFICON Cygnus Thin Film Deposition Controller - Manual (Page 43)

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Cygnus Operating Manual
F
ig
u
re 2-4
C
yg
nus Displ
ay
H
ierarchy
GENER
A
L
P
ARM
S
GENER
A
L
M
A
IN
T
E
NAN
CE
CH
AN
N
E
L
(F
1)
(F
2)
(F
6)
LOGI
C
DI
REC
T
OR
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I/O
MA
P
FL
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DI
S
K
CO
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/
TI
MER
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SELEC
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GENER
A
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P
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ME
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ME
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ME
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DD
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(F
1)
(F3)
(F
2)
(F
4)
(F
5)
(F6)
(F
1)
(F2)
(F3)
(F
1)
(F
2)
(F
3)
(F4)
(F
5)
(F1)
(F
2)
(F3)
(F4)
(F
5)
(F1)
(F
2)
(F
3)
(F
4)
(F5)
(F
5)
(F
4)
(F3)
(F
1)
(F
2)
(F3)
(F4)
(F5)
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1)
(F
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3)
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(F
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FOR
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(F1)
(F2)
(F
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(F
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GENER
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GENER
A
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ALL
(F
6)
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F
L
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L
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C
T
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(F
6)
ST
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(F
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CHA
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(F
1)
(F6)
CLEA
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A
L
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