INFICON Cygnus Thin Film Deposition Controller - Manual (Page 22)

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Cygnus Operating Manual
1.4.2.1 Instrument Set Up Parameters
Test On. . . . . . . . . . . . . . . . . . . . . . . Yes / No
Time Compressed . . . . . . . . . . . . . . Yes / No
Audio Feedback . . . . . . . . . . . . . . . . Yes / No
RS232 Baud Rate . . . . . . . . . . . . . . 2400, 4800, 9600, 19200
IEEE Address. . . . . . . . . . . . . . . . . . 1-30
Data Logging Path . . . . . . . . . . . . . . 0 = No Data Logging
2 = File, Page Format
3 = File, Comma Format
Data Log XTAL History. . . . . . . . . . . Yes / No
Print Screen Path . . . . . . . . . . . . . . . 2 = Floppy Disk
Print Screen Number . . . . . . . . . . . . 0 to 999
DAC Output Option . . . . . . . . . . . . . 0 = Power/Rate for 6 channels
1 = Power/Thickness for 6 channels
2 = Power/Rate/Thickness for 4 channels
3 = Rate/Thickness for 6 channels
Thickness Equation 1. . . . . . . . . . . . Up to 6 channel numbers can be specified,
each channel number can be used only
once.
Thickness Equation 2. . . . . . . . . . . . Up to 6 channel numbers can be specified,
each channel number can be used only
once.
Thickness Equation 3. . . . . . . . . . . . Up to 6 channel numbers can be specified,
each channel number can be used only
once.
1.4.2.2 Set Up Parameters for Each Source
Source States. . . . . . . . . . . . . . . . . . Film template defines state sequence.
Flexible sequencing is a done by skipping
states or vectoring to a different state.
Power Ramps. . . . . . . . . . . . . . . . . . 2 per Source
Power Level . . . . . . . . . . . . . . . . 0.00 to 99.99%
Rise Time . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
Soak Time . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
Rate Filter Time . . . . . . . . . . . . . . . . 0.1, 0.4, 1.0, 4.0, 10.0, 20.0, or 30.0 sec