INFICON Cygnus Thin Film Deposition Controller - Manual (Page 69)

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Cygnus Operating Manual
Chapter 3
Channel Parameters
3.1 Introduction
Cygnus can store the definition parameters for 6 Channels (or sources). There are
three primary displays associated with each Channel. These are the Channel
Parameters display, the Channel Hardware parameters display, and a graphical
data display. Each Channel is completely defined by programming Channel
Parameters and Channel Hardware parameters. Channel Parameters define the
material to be deposited and the deposition profile, for example: Density, Z-Ratio,
Rise Times and Soak Times. Channel Hardware parameters define the
digital-to-analog (DAC) functions, sensor type, as well as the shutter and crucible
outputs.
Figure 3-1 Display Tree for Channel Set Up
Channel set up is initiated by selecting the Channel (F6) key in the All Channels
data display. Selecting F6 brings up the Channel Graphical Display for the Channel
number indicated by the cursor.
ALL CHANNELS DATA DISPLAY
CHANNEL (Channel Graphical Display)
CHANNEL PARAMETERS
HARDWARE PARAMETERS