INFICON Cygnus Thin Film Deposition Controller - Manual (Page 196)

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Cygnus Operating Manual
8.4.3 Sensor Cover Connection
The Crystal Sensor Emulator can be used to verify the measurement system for
INFICON's Thin Film Deposition Controllers and Monitors.
NOTE: The Crystal Sensor Emulator 760-601-G1 is not compatible for use with a
Cygnus. Use 760-601-G2 for all thin film deposition controllers.
However, the Crystal Sensor Emulator's Sensor Cover Connector is compatible
with some sensor heads, and is incompatible with others. This is discussed in the
following sections.
8.4.3.1 Compatible Sensor Heads
The Sensor Cover Connection will fit the sensor heads shown in Table 8-4 .
8.4.3.2 Incompatible Sensor Heads
The Sensor Heads for which the Crystal Sensor Emulator's Sensor Cover
Connector will not fit are shown in
Table 8-5 .
NOTE: The Crystal Sensor Emulator’s Sensor Cover will not fit the crystal holder
opening of the older style INFICON transducers that have the "soldered"
finger springs.
Table 8-4 Compatible Sensor Heads
Sensor Head Part Number
Standard Sensor Head 750-211-G1
Standard Sensor Head with Shutter 750-211-G2
Compact Sensor Head 750-213-G1
Compact Sensor Head with Shutter 750-213-G2
Dual Sensor Head 750-212-G2
Table 8-5 Incompatible Sensor Heads
Sensor Head Part Number
UHV Bakeable Sensor Head (12 inch) 007-219
UHV Bakeable Sensor Head (20 inch) 007-220
UHV Bakeable Sensor Head (30 inch) 007-221
UHV Bakeable Sensor Head w/ Shutter (12 inch) 750-012-G1
UHV Bakeable Sensor Head w/ Shutter (20 inch) 750-012-G2
UHV Bakeable Sensor Head w/ Shutter (30 inch) 750-012-G3
Sputtering Sensor Head 750-618-G1
CrystalSix Sensor Head with position select 750-446-G1
CrystalSix Sensor Head 750-260-G1
Crystal12 Sensor Head 750-667-G1