INFICON Cygnus Thin Film Deposition Controller - Manual (Page 226)

Index - 2
IP
N 07
4-
37
9-
P1
K
Cygnus Operating Manual
H
hand-held controller 2-28
hello command 5-8
host/server 5-1
I
I/O map 4-17
IAE 9-14
idle ramp 3-6
IEEE488 5-1 , 5-3
port 5-3
input name parameters 5-18
Input/Relay module connection 6-11
installation location 6-1
integral time 9-13
interface cable fabrication 6-10
ISE 9-14
ITAE 9-14
L
Laplace transform 9-12
lock code 2-30
logic
directory 4-5
statement 4-5
statement editing 4-6
statements parameters 5-19
M
main power connection 1-5
mass sensitivity 9-1
material table A-1
measured deposition rate 9-13
message
error 8-1
status 8-1
message format 5-4
mode hopping 9-7
ModeLock oscillator 9-7 , 9-9
multiple layer deposition 7-4
N
negative response error code 5-37
noise from cables 6-7
O
Open Loop Method 9-11
output name parameters 5-23
output parameter type 5-24
P
parameter
commands 5-9
definitions 3-2
general 4-3
request established 5-9
saving 4-19
period measurement 9-4
PID 3-3 , 9-11 , 9-13
power 9-13
power supply, isolated 6-14
precondition 3-4
process
definition 2-22
error 9-13
execution 2-22
pulse accumulator 9-4
Q
QCM 9-1
quality rate control 9-5
quartz crystal 9-1 , 9-15
quasiharmonic 9-2 , 9-9
query
logic statements 5-19
output names 5-23
R
rate
filter time 3-10
set point 9-13
RateWatcher 3-9
reference oscillator 9-4
remote
command 5-1
communication 5-1 , 5-37
Repair Service 1-6
resonance 9-6
rotary sensor 2-25
RS-232C 5-1 , 5-37 , 6-13
pin assignment 5-2
port 5-1
test 2-10
RTS/CTS 5-2