INFICON Cygnus Thin Film Deposition Controller User Manual

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Cygnus Operating Manual

MAXIMUM POWER . . . . . . . . . . . . . 0.0 to 99.99% (default = 90.00)

This parameter is used to set the maximum permissible % power level. The
control voltage output will not exceed this limit.

MINIMUM POWER . . . . . . . . . . . . . 0.0 to 99.98% (default = 0.00)

This parameter is used to set the minimum permissible % power level. The
control voltage output will not go below this limit during either the Deposit or
Non-Deposit Rate control states.

Power Ramps (Pre deposit states)

The next six parameters — Soak Power 1, Rise Time 1, Soak Time 1, and Soak
Power 2, Rise Time 2 and Soak Time 2 — are used to define two power ramps
provided to precondition materials.

SOAK POWER 1 . . . . . . . . . . . . . . . 0.0 to 99.99% (default = 0.00)

This parameter is usually set to the power level at which the source material
just begins to melt. The instrument ramps the power level from zero to Soak
Power 1 linearly over the time period Rise Time 1.

RISE TIME 1 . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec (default = 00:00)

This parameter provides the time period over which the source power is
ramped from 0 to Soak Power 1. See note.

SOAK TIME 1 . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec (default = 00:00)

This parameter provides the time period for which the instrument holds at Soak
Power 1. See note.

NOTE: Rise Time 1 and Soak Time 1 will be skipped and the channel will start with

the Rise Time 2 state if Idle Power is set to a non-zero value and the
channel is currently at Idle at this non-zero Idle Power.

SOAK POWER 2 . . . . . . . . . . . . . . . 0.00 to 99.99% (default = 0.00)

This parameter sets the power level at which the rate from the source very
nearly matches the desired deposition Rate. If Auto Soak 2 is enabled, this
parameter will automatically be updated when leaving deposit or nondeposit
control.

RISE TIME 2 . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec (default = 00:00)

This parameter sets the time period in which the instrument linearly ramps the
power level from Soak Power 1 to Soak Power 2.

SOAK TIME 2 . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec (default = 00:00)

This parameter sets the time period for which the instrument holds the power
level at Soak Power 2.