INFICON Cygnus Thin Film Deposition Controller - Manual (Page 63)

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Cygnus Operating Manual
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NOTE: If the crucible output type were normally closed (NC), Table 2-2 would
need to be modified by exchanging open and closed.
4 Determine whether Turret Feedback is desired. This allows the turret position
controller to stop further instrument processing until the requested turret
position is satisfied. If chosen, a turret input must be connected to the turret
position controller’s feedback signal within one minute, else a STOP Crucible
ERR occurs.
If Turret Feedback is not chosen, program a Turret Delay Time, which allows
an adequate time for positioning to take place. Once the delay time has
expired, instrument state processing continues.
5 The selection of a particular crucible for a channel is defined in the CHANNEL
PROCESS display.
Table 2-2 Wiring To The Controller
Crucible
Position Contact Status
Relay #6 Relay #7
1 Open Open
2 Closed Open
3 Open Closed
4 Closed Closed