INFICON Cygnus Thin Film Deposition Controller - Manual (Page 154)

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Cygnus Operating Manual
Table 6-3 Input/Relay Pin Connections
I/O Board #1 I/O Board #3
Relay # Pins TTL
Input #
Pin Relay # Pins TTL
Output #
Pin
1 7, 6 1 15 17 7, 6 25 9
2 9, 8 2 14 18 9, 8 26 10
3 11, 10 3 13 19 11, 10 27 11
4 13, 12 4 12 20 13, 12 28 12
5 5, 4 5 11 21 5, 4 29 13
6 3, 2 6 10 22 3, 2 30 14
7 1, 14 7 9 23 1, 14 31 15
8 15, 16 8 8 24 15, 16 32 1
9 7 33 2
10 6 34 3
11 5 35 4
12 4 36 5
13 3 37 6
14 2 38 7
GND 1 GND 8
I/O Board #2
Relay # Pins TTL
Input #
Pin
9 7, 6 15 15
10 9, 8 16 14
11 11, 10 17 13
12 13, 12 18 12
13 5, 4 19 11
14 3, 2 20 10
15 1, 14 21 9
16 15, 16 22 8
23 7
24 6
25 5
26 4
27 3
28 2
GND 1