INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
ON Final Thickness . . . . . . . . . . . . . 0 / 1 / 2
0 = Go to Non-Deposit Control
1 = Go to Idle Ramp
2 = Continue
Cross Talk Percent . . . . . . . . . . . . . . 0.00 to 99.99%, Correction for 2 sensors,
multiple instances of 2 sensor correction is
allowed (maximum of 3 instances of 2 sensor
correction).
Crucible Selection . . . . . . . . . . . . . . Turret is indexed to selected position on a
start. Turret feedback is checked whenever a
source is started. Range is from 1 to number
of crucibles.
Number of Crucibles. . . . . . . . . . 1, 4, 8, 16, 32 or 64
Crucible Output . . . . . . . . . . . . . 0 to 37
Crucible Output Type . . . . . . . . . 0 / 1
0 = Normally Open, 1 = Normally Closed.
Turret Feedback . . . . . . . . . . . . . Yes / No
Turret Input. . . . . . . . . . . . . . . . . 0 to 28
Turret Delay . . . . . . . . . . . . . . . . 1 to 60 secs.
RateWatcher® . . . . . . . . . . . . . . . . . Sample and Hold Feature
RateWatcher Option. . . . . . . . . . 0 = None, 1 = Non-deposit,
2 = Non-deposit and Deposit
RateWatcher Time . . . . . . . . . . . 00:01 to 99:59 min:sec
RateWatcher . . . . . . . . . . . . . . . Accuracy 1 to 99%
Source Voltage Range . . . . . . . . . . . 0 to 10 V, 0 to 5 V, 0 to 2.5 V, 0 to -10 V,
0 to -5 V, 0 to -2.5 V
DAC Rate Range . . . . . . . . . . . . . . . 0 = 10 Å/sec, 1 = 50 Å/sec, 2 = 100 Å/sec,
3 = 1000 Å/sec, 4 = 1 Å/sec
DAC Thickness Range. . . . . . . . . . . 0 = 100 Е, 1 = 1000 Е, 2 = 2000 Е,
3 = 3000 Е, 4 = 5000 Е
Substrate Shutter Output . . . . . . . . . 0 to 38
Substrate Shutter Output Type. . . . . 0 / 1
0 = Normally Open, 1 = Normally Closed