INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
47
(0x2f)
Dep after
PreDep
0 = Non Deposit
Control
1 = Deposit, No Auto
Soak
2 = Deposit, Auto Soak
Int
0
2
48
(0x30)
Rate Filter
Time
sec. 0.1, 0.4, 1.0, 4.0,
10.0, 20.0, 30.0
Float
0.1
30
49
0x31
Cross Talk
Percent
%
float
0.00
99.99
50
0x32
Auto-Z
1 = YES
0 = NO
Int
0
1
51
RateWatch
Option
0 = None
1 = Non Deposit
2 = Non Deposit and
Deposit
Int
0
2
NOTE 1: Outputs are numbered 1 through 38. Each can be used only once.
NOTE 2: Inputs are numbered 1 through 28. Each can be used only once.
NOTE 3: The number of Crucible Outputs required is dependent on the total number of crucibles. See
the following table. These outputs must be in consecutive order. The Crucible Output
parameter indicates the first output to be used. Therefore, the maximum value of this
parameter is dependent on the number of crucibles. For example, if the number of crucibles
is 16, and number of outputs is 4, and so the largest value acceptable for the crucible output
is 35, as outputs 35, 36, 37, and 38 will be used.
NOTE 4: The front panel display will show the time in Minutes:Seconds format, i.e., 5999 sec will be
shown as 99:59 mm:ss, etc.
Table 5-4 Channel Parameters (continued)
Channel
Command
ID
Name
Units / Allowed
Values / Notes
Data
Type
Low Limit
High Limit
Number of Crucibles
Number of Outputs
4
2
8
3
16
4
32
5
64
6