INFICON Cygnus Thin Film Deposition Controller - Manual (Page 138)

5 - 34
IP
N 07
4-
37
9-
P1
K
Cygnus Operating Manual
7
(0x07)
Go to Post Deposit (Idle Ramp). Cannot be done
if in Ready, Stop, Crucible Switch, or while
crystal switching.
8
(0x08)
Go to Manual (Substrate Shutter does not
change position). Cannot be done if in Crucible
Switch or there is not a good crystal.
9
(0x09)
Set Power Level. Only allowed in Manual, Time
Power, or Non-Deposit Hold State
0 to 99.99
10
(0x0A)
Open Substrate Shutter. Only allowed if in
Manual
11
(0x0B)
Close Substrate Shutter. Only allowed if in
Manual
12
(0x0C)
Clock Hold On, Stops timer in Pre-Deposit or
Post Deposit
13
(0x0D)
Clock Hold Off, Restarts timer in Pre-Deposit or
Post Deposit after Clock Hold On.
14
(0x0E)
Continue Deposit. Go to Deposit, but don’t zero
the thickness. Cannot be done from Ready,
Stop, Crucible Switch, or while crystal switching.
15
(0x0F)
Set Averaged Rate. Only in Time Power or
Non-Deposit Hold, the estimated rate is used
0 to 999.9
16
(0x10)
Switch Crystal
17
0x11
Crystal Fail Inhibit On. Crystal Fail output always
set to FALSE, even during crystal fail.
18
0x12
Crystal Fail Inhibit Off. Crystal Fail output has
normal meaning
19
0x13
Clear Q and S counts
20
0x14
RateWatcher sampling on. Will immediately
cause the Deposit state to leave HOLD and not
return until turned off.
21
0x15
RateWatcher Sampling Off. Allows the Deposit
state to go into the RateWatcher HOLD.
Table 5-10 Remote Channel Commands (continued)
RC
Command
ID Meaning Action Value