INFICON Cygnus Thin Film Deposition Controller - Manual (Page 130)

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Cygnus Operating Manual
5
(0x05)
State byte, encoding as follows:
0 = Ready
1 = Crucible Switch
2 = Rise 1
3 = Soak 1
4 = Rise 2
5 = Soak 2
6 = Deposit
7 = Time Power
8 = Non Deposit Control
9 = Non Deposit Hold
10 = Idle Ramp
11 = Manual
12 = Stop
6
(0x06)
State Time Integer, seconds, time in the current state
7
(0x07)
Accumulated Time Integer, seconds, time since Ready
8
(0x08)
Crystal Life Integer, range will be 0 to 100
9
(0X09)
Crystals Remaining Integer, range between 0 and 12, number of good
crystals on CrystalTwo, CrystalSix, Crystal12, or
Rotary.
10
(0X0A)
Crystal Position byte, range between 1 and 12. The current crystal
position on a CrystalTwo, CrystalSix, or Crystal12
11
(0X0B)
Sensor State byte, range between 0 and 2. 0 = Good crystal,
1 = Failed crystal, 2 = Invalid measurement on
crystal
12
(0x0C)
Fundamental
Frequency Integer, unconverted. See Note 2.
13
(0x0D)
Fundamental Activity Integer, range 0 to 650
Table 5-8 Status Channel Commands (continued)
SC
Command
ID (HEX) Meaning Response