INFICON Cygnus Thin Film Deposition Controller - Manual (Page 60)

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Cygnus Operating Manual
2.7 Special Features
Cygnus has several special features to enhance the performance of the
instrument.
2.7.1 Crystal Switching
Cygnus offers a choice of Single, CrystalTwo, CrystalSix, Crystal12 or Rotary
sensors. The CrystalTwo, CrystalSix, Crystal12, and Rotary sensors provide a
backup monitor crystal in case a crystal fails during deposition. Sensor types are
specified on the Channel Hardware Display.
A crystal switch will automatically occur when:
 The instrument is configured for a CrystalTwo sensor type, a channel is
STARTed or running and there is another good crystal available when the
active crystal fails.
 The instrument is configured for a CrystalSix or Crystal12, a channel is
STARTed or running, and there is at least one good crystal left in the carousel
when the active crystal fails.
 The instrument is configured for a Rotary sensor, the channel is running, and
there is at least one good crystal in the Rotary sensor. 
NOTE: The following are Post-Deposit states.
IDLE RAMP Source changing to Idle Power. Inactive Inactive
STOP Source output set to zero power. The
display is frozen at the last rate and
thickness values. Inactive Inactive
NOTE: In the STOP state the instrument will accept a START
provided a Crystal Failure for the sensors used in the channel being
started is not present.
NOTE: The following is a Non-Deposit state.
MANUAL Source power controlled by hand-held
controller. Inactive Active
Table 2-1 State Descriptions (continued)
STATE CONDITION RELAY CONTACT
STATUS
Substrate
Shutter Sensor
Shutter