3 channel display – INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
F3 TEST XIU
To initiate the XIU Self Test, press function key F3. The XIU Self Test
determines whether the Crystal Interface Unit (XIU) and Measurement Card
pair is operating properly.
NOTE: For the XIU Self Test to work properly, the XIU must have the
6" (152.4 mm) BNC cable (IPN 755-257-G6) attached and must be
disconnected from the sensor feedthrough.
F4 CLEAR QUALITY / STABILITY
To clear the Quality and Stability counters, press function key F4.
F5 GENERAL MAINTENANCE
To access the General MAINTENANCE display, press function key F5.
F6 ALL CHANNELS
To access the ALL CHANNELS display, press function key F6.
2.3.1.3 CHANNEL Display
) provides information about the
specified channel. The rate, thickness, power level, state, state time, and run time
are all updated once a second. Near the bottom of the display is a graph that
provides an analog display of the rate deviation from the desired rate, while the
channel is in a Rate Control state. Alternatively, the graph can display the percent
power being output during a process. The SCALE and SCAN RATE parameters
control the meaning, scaling and speed of the graph.
On the top right of the display is a general message area. This area displays
information that is not channel specific, such as indicating that the instrument is in
TEST mode The region adjacent to the graph displays channel specific status
information,. For a complete list of error and status messages, see