21 set run state, 22 get run state – INFICON SQC-310 Thin Film Deposition Controller User Manual
Page 97

5 - 17
IP
N 07
4-
55
0-
P1
B
SQC-310 Operating Manual
5.3.21 Set Run State
Command: . . . . . U
Description: . . . . Sets the instruments operating state.
Parameters:
0 = Start Process
32 = Zero Thickness
1 = Stop Process
33 = Zero Time
2 = Start Layer
38 = SoakHold Enable
3 = Stop Layer
39 = SoakHold Disable
4 = Next Layer
5 = Force Final Thickness
Example: . . . . . . To start the active process, send: U0
5.3.22 Get Run State
Command: . . . . . V
Description: . . . . Returns the Phase #, Process Elapsed Time (as shown on
display), Process #, and Active Layer of the active process.
Parameters:
0 = Stopped
13 = Deposit
26 = Manual Power
1 = Crystal Verify
14 = Rate Ramp
27 = Snsr Feedback Timeout
2 = Initialize Layer
15 = Rate Ramp Deposit
28 = Src Feedback Timeout
3 = Manual Start Layer
16 = Timed Power
29 = Invalid Crystal Position
4 = Crystal Rotate
17 = Rate Sample Hold
30 = Invalid Pocket Position
5 = Pocket Rotate
18 = Rate Sample
31 = Sample Hold
6 = PreCond (CoDep only)19 = Crystal Switch
32 = Sampel Continuous
7 = Ramp1
20 = Feed Ramp
33 = Crystal Fail, Halted
8 = Soak 1
21 = Feed Soak
34 = Next Crystal
9 = Ramp 2
22 = Idle Ramp
10 = Soak 2
23 = Start Next layer
11 = Soak Hold
24 = Crystal Fail
12 = Shutter Delay
25 = Stop Layer
Example: . . . . . . To read the run state, send: V
The return string for the Deposit Phase, Elapsed Time =15
seconds, Active Process #1, Layer #2 is: 13 15 1 2
Command: . . . . . VA
Description: . . . . Gets the on/off status of each possible alarm.