INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 16)

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SQC-310 Operating Manual
1.4 System Connections
Figure 1-4 System Connections
Sensor
In-Vac
Cable
Feedthrough
6 in. BNC Cable
Oscillator
Source
Shutter
BNC
Cables Evaporation Supply
Output Control Input
Ground Wire
Table 1-3 System Components
Sensor Holds the quartz crystal used to measure rate and thickness.
Crystals must be replaced occasionally.
In-Vac Cable A coaxial cable that connects the sensor to the feedthrough.
Feedthrough Provides isolation between vacuum and atmosphere for electrical
and cooling lines.
6” BNC Cable Provides a flexible connection from the feedthrough to the
oscillator. Keep this cable as short as possible.
Oscillator Contains the electronics to operate the quartz crystal. Total cable
length to the crystal should be under 40 in.
Sensor Input
BNC Cable Connects the oscillator to the SQC-310 sensor input. Lengths up
to 100 ft. are acceptable.
Control Output
BNC Cable Connects the SQC-310 output to the evaporation source’s control
voltage input. Keep the length under 10 ft..
Ground Wire A wire, typically braided, that connects the vacuum system to the
SQC-310 ground terminal. Important for noise rejection.