INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 73)

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SQC-310 Operating Manual
3.11.3 Sensors and Sources Menu
The Sensors and Sources Menu allows you to configure the SQC-310 to the types
of sensors and sources in your system, particularly multi-crystal sensors and
multi-pocket sources.
Figure 3-20 Sensor 1 Edit
3.11.3.1 Sensor Setup
Crystal Tooling: Adjusts for the difference in measured deposition rate between
the sensor and the substrate being coated.
Figure 3-21 Tooling
In the left illustration, the sensor will measure less rate or thickness than is actually
deposited on the substrate because of its positioning. In the right illustration, the
sensor will measure more. Tooling is the ratio of the actual substrate deposition
rate or thickness, to that measured by the sensor. If the rate/thickness reading is
low, then increase the tooling value. If the rate/thickness reading is high, then lower
the tooling value.
Substrate
Substrate
Tooling
Over 100%
Tooling
Under 100%