5 get/set layer parameters – INFICON SQC-310 Thin Film Deposition Controller User Manual
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SQC-310 Operating Manual
Parameters:
Insert a NonCoDep Layer in this Process
Insert a CoDep Layer in this Process.
Format: . . . . . . . . CC[Process#] [LayerPosition#] [Film#]? [Parameter]
Example: . . . . . . CC1 2 9? 1
Returns: A1,1
5.3.5 Get/Set Layer Parameters
Command: . . . . . D
Description: . . . . Most layer parameters are directly related to a setting on the
layer edit screen. You can get/set multiple layer parameters as
explained in Film Parameters.
Parameters:
1
Init Rate
16. Ramp1 Time
2
Final Thickness
17. Ramp2 Enable
3
Time SetPoint
18. Ramp2 Start
4
Thickness Limit
19. Ramp2 Rate
5
Start Mode
20. Ramp2 Time
6
Output
21. Film Number
7
Max. Power
24. Layer Available
8
Slew rate
25. Min. Power
9
Sensor 1
26. Power Alarm Dev (sec.)
10
Sensor 2
27. Rate Dev. Attention
11
Sensor 3
28. Rate Dev. Alert
12
Sensor 4
29. Rate Dev. Alarm
13.
Ramp1 Enable
14. Ramp1
Start
15. Ramp1
Rate
Command: . . . . . DA
Description: . . . . Gets/Sets the parameters for the given layer as specified by the
given process number, layer number in the process, and the
assigned source number.
Parameters: (same as above)
1
Init Rate
16. Ramp1 Time
2
Final Thickness
17. Ramp2 Enable
3
Time SetPoint
18. Ramp2 Start
4
Thickness Limit
19. Ramp2 Rate
5
Start Mode
20. Ramp2 Time