INFICON SQC-310 Thin Film Deposition Controller User Manual
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SQC-310 Operating Manual
We have completed the design of a single layer process.
Table 1-8 Editing a Setting
Edit Menu
Operation
To edit a setting in any menu, turn the control knob to scroll to the
desired setting, then press the Edit SoftKey. The cursor moves to
the setting value, and the SoftKey functions change to show:
Next: Store the parameter and move to next parameter for editing.
Cancel: Stop editing and return the selected parameter to its
previous value.
Enter: Stop editing and save values for selected parameter.
In Edit mode, adjust the control knob to set the desired parameter
value.
Edit
Layer 1
Spend some time navigating through the Layer 1 parameters and
editing values. Be sure to enter an Initial Rate and Final Thickness,
and select a Source and Sensor(s).
Press To Main to return to the Main Screen.
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