3 sqc-310 commands, 1 get model, 2 get/set film parameters – INFICON SQC-310 Thin Film Deposition Controller User Manual
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SQC-310 Operating Manual
5.3 SQC-310 Commands
5.3.1 Get Model
Command: . . . . . @
Description: . . . . Returns the model number and software version number.
Parameters: . . . . None
Example: . . . . . . The @ command returns “SQC-310 Ver 6.01”
5.3.2 Get/Set Film Parameters
Command: . . . . . A
Description: There are four film commands. A1 sets/gets the film
name. A2 sets/gets the main film edit screen parameters. A3
sets/gets the film conditioning parameters. A4 sets/gets the
deposit controls parameters.
To Get Film Parameters send the command (i.e., A1), a space,
the film number, a question mark, then a series of spaces and
parameter numbers. You may include as many parameters as
you want, in whatever order you want. The format of the return
string is a series of parameter numbers, a comma, and its value,
separated by spaces.
To Set Film Parameters send the command, a space, the film
number, then a series of parameter numbers, a comma, and the
parameter value.
Parameters: . . . . A1: FilmName
A2:
1
P Term
7
Crystal Quality, Rate Dev %
2
I Term
8
Crystal Stability, Single Freq Shift
3
D Term
9
Xtal Fail Mode (obsolete)
4
Material #
10
Crystal Quality, Max Count
5
Pocket*
11
Crystal Stability, Total +Freq Shift
6
Tooling
A3:
1
Ramp1 Power
7
Idle Power
2
Ramp1 Time
8
Idle Ramp
3
Soak1 Time
9
Feed Power
4
Ramp2 Power
10
Feed Ramp
5
Ramp2 Time
11
Feed Time
6
Soak2 Time