INFICON SQC-310 Thin Film Deposition Controller User Manual
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SQC-310 Operating Manual
Relays: Activate one of the SQC-310 relays (choose relay 1 - 16*).
SoftNodes: Sets a Softened to true (choose softnote 1 - 8).
Timers: Start a timer (choose timer 1 - 8).
Alarms: Activate one of the SQC-310 alarms. Alarm options include:
Attention (least severe)
Alert (more severe)
Alarm (most severe)
Process Actions: Start or Reset current process, or select process 1 - 100.
Layer Actions: Perform an action on the current layer. Available actions include:
Start Layer
Start Next Layer
Stop Layer
Force Final Thickness
Zero Thickness
Zero Time
Soak Hold
CAUTION
If changes are made in the Logic Menu, be sure to exit to
the System Menu or Main Screen before powering down.
Your changes will not be saved otherwise.
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