INFICON SQC-310 Thin Film Deposition Controller User Manual

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SQC-310 Operating Manual

BCD: Select when position control is through an external rotation controller
which accepts Binary Coded Decimal inputs for position selection. BCD
inputs are common because they require only a few signal lines to select
several positions. The SQC-310 automatically creates the number of relay
outputs required to interface with the external controller.

Individual: Select when position control requires a unique signal line for
each position. The SQC-310 automatically creates the number of relay
outputs required to interface with the external controller.

Feedback Type: Defines the type of feedback for a multi-crystal sensor head. This
is how the SQC-310 identifies the current crystal position.

None: No crystal feedback is provided. The SQC-310 tracks crystal position
from the current position setting (above). This setting is used for the INFICON
CrystalSix and Crystal12.

Individual: Uses one input for each pocket position in the source. All inputs are
normally false (open circuit) unless the respective pocket is in position when
that input is true (closed to ground). This setting is used for the INFICON
RSH-600.

BCD: Uses binary coding to indicate the pocket position. For example, an
eight-pocket source would use three inputs. With pocket one in position, all
inputs would be false. With pocket four in position, inputs one and two would be
true and input three would be false.

Single Home: This feedback indicates there is a single feedback signal that
indicates when pocket one is in position.

In Position: The input is normally false (open circuit) and goes true (closed to
ground) when any pocket is in position.

Indexer Delay: This parameter has two different functions. If the Feedback Type
is “None” the controller waits the designated time on the assumption that the pocket
will get into position by the end of the delay. If there is position feedback, the
controller will wait this time for the pocket to reach its target position. If it does not
receive the feedback signal, a Pocket Wait Timeout error is issued.