INFICON SQC-310 Thin Film Deposition Controller User Manual

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SQC-310 Operating Manual

Numeric Values: Any integer between 1 and 64133. Numeric values are used with
timer conditions, such as IF Timer1 < 100 THEN Relay1.

Inputs: Choose the logic state (active state) of one the SQC-310 digital inputs as
a condition. If the specified input becomes active, the logic statement will become
true (choose input 1 - 16*)

Relays: Choose the logic state (active state) of one the SQC-310 relays as a
condition. If the specified relay becomes active, the the logic statement will become
true (choose relay 1 - 16*).

SoftNodes: SoftNodes allow you to build logic statements that are based on other
logic statements. There are 8 softnodes available for use.

For example, you might create a logic statement:

IF (Input1 AND Input2) OR Input3 THEN SoftNode1

You can now use that logic statement in another logic statement such as

If (SoftNode1 AND CrystalFail) THEN Stop Layer

Timers: The timer condition is evaluated true whenever the timer’s value is greater
than the value entered in the timer condition. There are 8 timers available for use.

Sensors: Allows you to choose between various sensor conditions. Available
sensor conditions include:

Sensor Enabled (choose sensor 1 - 4*)

Sensor Shutter (choose sensor 1 - 4*)

Sensor Fail (choose sensor 1 - 4*)

All Crystals Fail

All Crystals Good

Dual Crystal Shutter (choose dual sensor 1 or 2*)

Sensor Timeout (choose sensor 1 - 4*)

Sources: Allows you to choose between various source conditions. Available
source conditions include:

Source Enabled (choose source 1-4*)

Source Shutter (choose source 1-4*)

Source Timeout (choose source 1-4*)

Internal States: Allows you to choose an internal state as a condition. Available
states include:

Stopped

Crystal Verify