INFICON SQC-310 Thin Film Deposition Controller User Manual
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SQC-310 Operating Manual
Figure 2-4 Deposition Controls Menu
Shutter delay causes the SQC-310 to delay opening the shutter until the process
has stabilized at the desired deposition rate. Capture is the % rate deviation that
must be achieved to open the shutter and go to the Deposit phase. Shutter delay
is the maximum amount of time to wait for capture to be achieved. Set Shutter
Delay and Capture to zero to disable this feature.
NOTE: During co-deposition, the SQC-310 waits for all films to achieve capture
before moving to the deposit phase. If any film fails to achieve rate capture
within its programmed shutter delay time, an error occurs.
When the Control Delay function is used, the control loop will not react to the rate
for a set amount of time at the beginning of the Deposit state. This helps to
eliminate overcompensation by the control loop due to rate spikes when the sensor
or source shutter opens. Control Delay is the amount of time the SQC-310 will wait
before the control loop takes over.
Control Error is a setting that instructs the SQC-310 what to do if it is unable to
maintain the desired deposition rate (for example, out of material or a bad sensor).
One of three actions is possible: Keep trying (Ignore), set power to zero to halt
deposition (Stop), or maintain constant power (Hold) and extrapolate thickness
from the last good rate reading. Until your process is known and stable, it is best to
leave the Control Error setting on Ignore.
Rate sampling can extend sensor life in high rate processes. Select Cont
(continuous) to disable rate sampling. A Time selection closes the shutter for a
fixed time, then opens the shutter for a fixed time to sample the rate. Acc Based
(accuracy based) sampling closes the shutter for a fixed time, then opens the
shutter until the desired rate is achieved. Rate Sampling assumes a very stable
process!
Now, from the main Film Menu, press Configure Sensors. This menu defines
operation of the film when a sensor fails. See