INFICON SQC-310 Thin Film Deposition Controller User Manual
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SQC-310 Operating Manual
With Material highlighted, press Edit to scroll through the list of available materials.
Select the desired material and press Enter. You could also change the Density
and Z-Ratio for the selected material, but it is unlikely those values are wrong. You
cannot add materials, but you can edit the Name, Density, and Z-Ratio of one of
the 100 existing materials.
Film conditioning adjusts the output power level to achieve a desired material state
before and after deposition. Press Film Conds to enter the film conditioning menu.
Figure 2-3 Film Conditioning Menu
Ramp1 starts at 0% power and increases the power during Ramp1 Time to the
Ramp 1 power level. Set the Ramp 1 Power and Time to gradually bring the
material to a near molten state. Set the Soak 1 Time to a value that will allow the
material to homogeneously achieve that state. Ramp 2 is used to slowly bring the
material to a power level that nearly matches the desired deposition power. Use
Soak 2 to hold the material at that level until deposition (i.e., rate control) begins.
If you use wire feed to replenish material after deposition, set the Feed Power and
times as required. The idle conditioning phase typically ramps output power back
toward zero at the end of a process.
From the Film Conds menu, press Prev Menu to return to the main Film Menu.
Now press Deposit Controls. The Deposit Controls menu contains parameters
that modify operation during the deposition phase. See
.