INFICON SQC-310 Thin Film Deposition Controller User Manual

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SQC-310 Operating Manual

Film Tooling: Compensates for sensor sensitivity to the selected material. Use
Xtal Tooling in the System Parameters menu to compensate for each sensor
individually.

Pocket: Indicates which pocket of a multi-material indexer should be used. You
must first configure the Source in the Sources and Sensors screen of the System
Menu.

Crystal Quality, Rate Deviation: The maximum allowed rate deviation, from the
rolling average of the previous 16 rate readings. Each time the rate deviation
exceeds the selected percent value, a counter is incremented. Each time the
deviation is within the selected value, the counter decrements (to 0 minimum). If
the counter reaches Crystal Quality, Counts (see below) during a layer, the process
is aborted. Setting this value to zero disables the Crystal Quality alarm.

Crystal Quality, Counts: A counter is incremented each time Crystal Quality, Rate
Deviation is exceeded, then decremented each time a reading is within the rate
deviation. If the counter reaches Crystal Quality, Counts during a layer, the process
is aborted. Setting this value to zero also disables the Crystal Quality alarm.

NOTE: The Crystal Quality settings are very sensitive to PID loop tuning. It is best

to leave Crystal Quality disabled until you are confident of your process
and PID settings.

Crystal Stability, Single: As material is deposited on the crystal, the frequency
normally decreases. However arcing, mode hopping, or external stresses may
cause the crystal frequency to increase. If a single large positive shift exceeds this
value (in Hz) during a process, a crystal fail condition is indicated.

Crystal Stability, Total: As material is deposited on the crystal, the frequency
normally decreases. However arcing, mode hopping, or external stresses may
cause the crystal frequency to increase. If the accumulated value of these positive
frequency shifts exceeds this value (in Hz) during a process, a crystal fail condition
is indicated.

Material: Selects a material assigned to this film. As materials change, their
density and Z-Ratio are updated.

Density: Sets the density for this material. Material density has a significant impact
on deposition calculations.

Z-Factor: Sets the Z-Ratio, an empirically determined measure of a material’s
effect on quartz crystal frequency change.