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INFICON SQC-310 Thin Film Deposition Controller User Manual

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SQC-310 Operating Manual

To add a Codeposited film to an existing layer, scroll to below the desired
Co-deposition layer. Press Insert New, select the desired film, then press Insert
CoDep
. The Codeposited film will be inserted in the layer above the selected layer,
and indented to show that it is a Co-deposition film. CoDep is available only on the
SQC-310C.

Figure 2-6

shows two films being Codeposited with Film1, then a fourth film being

deposited as an additional layer. While layers are always numbered sequentially,
the films are sequential only for this example. Any film can be used in any layer.

Figure 2-6 Edit Layer Menu

To delete a layer, highlight it in the Layer Select menu and press Delete.

To move or duplicate a layer, highlight it in the Layer Select menu and press Copy.
On the Paste menu, press Paste to replace a layer. Press Insert Normal or Insert
CoDep
to insert it above the highlighted layer. A copy of the layer is saved to the
cut/paste clipboard memory.

NOTE: Once a film is assigned to a process layer, you cannot change the film.

Instead, cut the layer, then insert a new layer and select the desired film.