INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 62)

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SQC-310 Operating Manual
Descriptions of each System Parameter follows:
Period: Sets the measurement period between 0.1 second (10 readings per
second) and 1 second. A longer period gives higher reading accuracy, especially
in low rate and low density applications.
Period Frequency
(seconds) Resolution (Hz)
.10 .03
.25 .01
.50 .005
.75 .004
1.00 .003
Simulate Mode: Normal mode uses the quartz crystals as inputs to the SQC-310
for PID calculations and source output control. Simulate mode simulates the quartz
crystals based on the crystal frequency min/max. Simulate mode is useful for
debugging process recipes but does not accurately mimic actual process control
performance.
System Tooling: Adjusts for overall sensor deposition rates that differ from the
measured substrate deposition rate.
Min/Max Frequency: The frequency values for the quartz crystal sensors used as
inputs to the SQC-310. The maximum frequency should be set to the frequency of
a new crystal, typically 6 MHz. Sensor readings outside the min/max values cause
an error.
Dev Graph Limit: Sets the upper limit for the Rate Deviation graph Y-axis.
Table 3-10 System Menu SoftKeys
To Main Returns to the Main Menu.
Edit Selects the highlighted parameter for edit. SoftKey functions
change to:
Next: Store parameter and move to next for editing.
Cancel: Stop editing and undo changes to selected parameter.
Enter: Stop editing and save values for selected parameter.
Control Knob: Turn to adjust value. Push to store value and move
to next parameter.
Input & Relays Displays menu for assigning inputs and relays.
Logic Menu Displays menu for building logic statements.
Sensors & Sources Displays menu for identifying sensor and source types.