INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 95)

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SQC-310 Operating Manual
5.3.14 Get Output Rate
Command: . . . . . M
Description: . . . . Returns the average rate of all sensors assigned to the
requested output.
Parameters: . . . . Output Number
Example: . . . . . . To Get Output 1 rate, send: M1
The return string is of the form: 1.00
5.3.15 Get Sensor Thickness
Command: . . . . . N
Description: . . . . Returns the thickness reading for the requested sensor.
Parameters: . . . . Sensor Number
Example: . . . . . . To Get Sensor 1 thickness, send: N1
The return string is of the form: 1.000
5.3.16 Get Output Thickness
Command: . . . . . O
Description: . . . . Returns the average thickness of all sensors assigned to the
requested output.
Parameters: . . . . Output Number
Example: . . . . . . To Get Output 1 thickness send: O1
The return string is of the form: 1.000
5.3.17 Get Sensor Frequency/Crystal Life
Command: . . . . . P
Description: . . . . Returns the frequency of the requested sensor.
Parameters: . . . . Sensor Number
Example: . . . . . . To Get Sensor 1 frequency, send: P1
The return string is of the form: 5543210.00
Command: . . . . . PA
Description: . . . . Returns the status, frequency, and crystal life of the requested
sensor.
Parameters: . . . . Sensor Number