INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 86)

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SQC-310 Operating Manual
5.3.4 Get/Set Process Parameters
Command: . . . . . C
Description: . . . . Gets/sets the four process parameters. In the parameter list
below, Number Layers is the number of layers in a process,
counting CoDep layers as 1 layer. Actual Layers is the total
number of layers. For example, a process with one CoDep layer
(using two films) would have Number Layers=1 and Actual
Layers=2.
The First Layer is the layer number of the first layer in the
process. Subsequent layers are found by reading the Next
Layer parameter (see the D command, Layer Parameters).
Parameters: 1 Process Name 3 First Layer
2 Number Layers 4 Actual Layers
Example: . . . . . . To Get Process 1 name, send: C1? 1
The return string would be of the form: AnyName
To Set the parameter, send: C1 1,AnyName
NOTE: Unlike Get/Set Film Parameters, you can only get/set
one process parameter at a time.
Command: . . . . . CA
Description: . . . . Performs a process specific command.
Parameters: 1 Create A New Process
2 Delete A Process
3 Delete All Layers In This Process
4 Check This Process (1 is ‘process is OK’)
Format:. . . . . . . . CA[Process#]? [Parameter]
Example: . . . . . . CA1? 1
Returns: A1,1
Command: . . . . . CB
Description: . . . . Performs a process & layer location specific command.
Parameters: 1 Cut this Layer from this Process
Format:. . . . . . . . CB[Process#] [LayerPosition#]? [Parameter]
Example: . . . . . . CB1 2? 1
Returns: A1,1
Command: . . . . . CC
Description: . . . . Performs a process, layer location & film specific command.