INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 74)

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SQC-310 Operating Manual
Shutter: If the sensor has no shutter, select none to disable sensor shutter
features. If the sensor is a typical dual sensor, with a shutter that is only activated
when the primary sensor fails, select Dual. For other sensor shutters that activate
when the sensor is used, select Yes.
Shutter Delay: If the Yes option is selected for shutter, enter the time required
for the shutter to open and stabilize.
Number of Positions: This parameter defines the number of crystals available for
that sensor input. For single head sensors set to one. For a typical dual sensor
head with separate oscillators and sensor connections, this is also set to one
because there is only one crystal for each sensor input. For a rotary type
multi-crystal head set to the number of crystals available.
Current Position: If a multi-crystal sensor has position feedback, this
parameter is not needed. For sensors with only In Position or no position
feedback, enter the current crystal position.
Control Type: Defines the type of crystal or pocket position control utilized for
a multi-crystal sensor.
Manual: Not under control of the SQC-310. With manual control, the
SQC-310 will stop the process upon the completion of the current layer. If
the next layer requires a different crystal position. a message is displayed
prompting the operator for the number of the crystal required. Once the
position has been changed the operator presses the Continue SoftKey.
Direct: Used when the actuating device is driven directly. In this case the
controller creates one or two outputs, one for each available direction, to
drive a motor or solenoid.
Drive Type: Defines the drive method or direction for Direct control
Up, Down, Fast, and Inline: Select Up to create a single relay output
which the SQC-310 activates to increment the sensor to the next crystal
position. Down works identically, except the relay output is labeled
“Sensor Drive Down”. Select Fast to create both an up and down
outputs. The controller will then determine the fastest direction to the
target crystal position by activating the appropriate output. The Inline
drive type informs the controller that continuous travel in one direction
is not possible. Therefore to get from position 6 to 1, the direction must
be down through 5,4 etc. until 1 is reached.
Single Step and Double Step: Used when multi-crystal sensor heads
are actuated by pulsing a pneumatic value. INFICON CrystalSix uses
Double Step. INFICON Crystal12 and RSH-600 use Single Step.