INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 45)

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SQC-310 Operating Manual
3.4 Main Screen, Menu 3
Menu 3 can be accessed only while the process is stopped. This menu gives
access to process, film, and system setup parameters that cannot be altered while
a process is running.
To change these parameters when a process is running: Stop the process; modify
the parameters; then restart the process at the desired layer.
Table 3-3 describes the function of each SoftKey on Main Screen Menu 3.
Sensor Info Replaces the Main Screen with the Sensor screen.
Next
Layer Sequences through each process layer. Use this key to start or
restart the process at any layer.
Start
Layer Each layer in a process can be defined as Auto Start or Manual
Start. Auto Start layers begin immediately on completion of the
previous layer. Manual start layers wait for the operator to press
Start Layer. Only visible when waiting to Manual Start.
Start/Reset Starts or halts the current process. Sets all outputs to zero.
Table 3-2 Main Screen, Menu 2 Softkeys (continued)
Table 3-3 Main Screen Menu 3 Softkeys
Next
Menu Sequences through each of the three Main Screen menus.
Process
Menu A process is a sequence of layers of deposited film(s). The Process
Menu selection allows you to build and edit the sequence of
process layers.
Film
Menu A film is basically a material plus the setup information necessary
to deposit that material. Settings on the Film Menu include pre/post
conditioning, deposition error controls, and the physical chamber
setup for that material.